Browsing by Author "Duffy, G."
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- ItemHigh brightness EUV light sources for actinic metrology(2010) Choi, P.; Zakharov, S.V.; Aliaga R., Raúl; Bakouboula, A.; Bastide, J.; Benali, O.; Bove, P.; Cau, M.; Duffy, G.; Kezzar, W.; Lebert, B.; Powell, K.
- ItemHigh performance next generation EUV lithography light source(2009) Choi, P.; Zakharov, S.V.; Aliaga R., Raúl; Benali, O.; Duffy, G.; Sarroukh, O.; Wyndham, Edmund; Zakharov, V.S.