Browsing by Author "Yap, Seong Ling"
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- ItemExperimental investigations of the effect of the neutral gas pressure on the separate control of ion energy and flux in dual frequency capacitively coupled plasmas(2019) Saikia, Partha; Bhuyan, Heman; Yap, Seong Ling; Escalona Álvarez, Miguel Benito; Favre Domínguez, Mario; Wyndham, Edmund; Schulze, Julián