Experimental study and analytical modelling of the effect of the driving frequencies on dual frequency capacitively coupled plasmas

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dc.contributor.authorSaikia, Partha
dc.contributor.authorBora, Bijit
dc.contributor.authorSchulze, Julián
dc.contributor.authorBhuyan, Heman
dc.date.accessioned2020-12-10T22:45:22Z
dc.date.available2020-12-10T22:45:22Z
dc.date.issued2018
dc.fuente.origenConveris
dc.identifier.doi10.1063/1.5032296
dc.identifier.eissn1089-7674
dc.identifier.issn1070-664X
dc.identifier.urihttps://doi.org/10.1063/1.5032296
dc.identifier.urihttps://repositorio.uc.cl/handle/11534/49757
dc.issue.numeroNo. 8
dc.language.isoen
dc.pagina.final083501-9
dc.pagina.inicio083501-1
dc.revistaPhysics of Plasmases_ES
dc.rightsacceso restringido
dc.titleExperimental study and analytical modelling of the effect of the driving frequencies on dual frequency capacitively coupled plasmases_ES
dc.typeartículo
dc.volumenVol. 25
sipa.codpersvinculados1003913
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