Measurements of time average series resonance effect in capacitively coupled radio frequency discharge plasma
dc.contributor.author | Bora, Bijit | |
dc.contributor.author | Bhuyan, Heman | |
dc.contributor.author | Favre Domínguez, Mario | |
dc.contributor.author | Wyndham, Edmund | |
dc.contributor.author | Bora, Bijit | |
dc.contributor.author | Bhuyan, Heman | |
dc.contributor.author | Favre Domínguez, Mario | |
dc.contributor.author | Wyndham, Edmund | |
dc.date.accessioned | 2016-05-10T18:16:27Z | |
dc.date.available | 2016-05-10T18:16:27Z | |
dc.date.issued | 2011 | |
dc.identifier.doi | 10.1063/1.3646317 | |
dc.identifier.issn | 1070-664X | |
dc.identifier.uri | https://repositorio.uc.cl/handle/11534/14016 | |
dc.identifier.uri | https://doi.org/10.1063/1.3646317 | |
dc.language.iso | en | |
dc.nota.acceso | Contenido completo | |
dc.relation.isformatof | Physics of Plasmas (18), p. 1-6. | |
dc.revista | Physics of Plasmas | es_ES |
dc.rights | acceso abierto | |
dc.subject.ddc | 510 | |
dc.subject.dewey | Matemática física y química | es_ES |
dc.subject.other | Plasma (Gases ionizados) | es_ES |
dc.subject.other | Oscilaciones | es_ES |
dc.title | Measurements of time average series resonance effect in capacitively coupled radio frequency discharge plasma | es_ES |
dc.type | artículo | |
sipa.codpersvinculados | 1011568 | |
sipa.codpersvinculados | 1003913 | |
sipa.codpersvinculados | 99732 | |
sipa.codpersvinculados | 100407 |
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