Experimental investigations of the effect of the neutral gas pressure on the separate control of ion energy and flux in dual frequency capacitively coupled plasmas

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dc.contributor.authorSaikia, Partha
dc.contributor.authorBhuyan, Heman
dc.contributor.authorYap, Seong Ling
dc.contributor.authorEscalona Álvarez, Miguel Benito
dc.contributor.authorFavre Domínguez, Mario
dc.contributor.authorWyndham, Edmund
dc.contributor.authorSchulze, Julián
dc.date.accessioned2020-12-10T22:45:22Z
dc.date.available2020-12-10T22:45:22Z
dc.date.issued2019
dc.fuente.origenConveris
dc.identifier.doi10.1063/1.5094603
dc.identifier.eissn1089-7674
dc.identifier.issn1070-664X
dc.identifier.urihttps://doi.org/10.1063/1.5094603
dc.identifier.urihttps://repositorio.uc.cl/handle/11534/49759
dc.issue.numeroNo. 8
dc.language.isoen
dc.revistaPhysics of Plasmases_ES
dc.rightsacceso restringido
dc.titleExperimental investigations of the effect of the neutral gas pressure on the separate control of ion energy and flux in dual frequency capacitively coupled plasmases_ES
dc.typeartículo
sipa.codpersvinculados1003913
sipa.codpersvinculados1039778
sipa.codpersvinculados99732
sipa.codpersvinculados100407
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