Diagnostic of capacitively coupled radio frequency plasma by homogeneous discharge model
dc.contributor.author | Bora, Bijit | |
dc.contributor.author | Bhuyan, Heman | |
dc.contributor.author | Favre Domínguez, Mario | |
dc.contributor.author | Wyndham, Edmund | |
dc.contributor.author | Bora, Bijit | |
dc.contributor.author | Bhuyan, Heman | |
dc.contributor.author | Favre Domínguez, Mario | |
dc.contributor.author | Wyndham, Edmund | |
dc.date.accessioned | 2016-05-10T18:16:17Z | |
dc.date.available | 2016-05-10T18:16:17Z | |
dc.date.issued | 2012 | |
dc.identifier.issn | 0375-9601 | |
dc.identifier.uri | https://repositorio.uc.cl/handle/11534/13912 | |
dc.language.iso | en | |
dc.nota.acceso | Contenido parcial | |
dc.relation.isformatof | Physics Letters A No. 16 (376), p. 1356-1359. | |
dc.revista | Physics Letters a | es_ES |
dc.rights | acceso restringido | |
dc.subject.ddc | 510 | |
dc.subject.dewey | Matemática física y química | es_ES |
dc.subject.other | Plasma (Gases ionizados) | es_ES |
dc.subject.other | Presión atmosférica | es_ES |
dc.title | Diagnostic of capacitively coupled radio frequency plasma by homogeneous discharge model | es_ES |
dc.type | artículo | |
sipa.codpersvinculados | 1011568 | |
sipa.codpersvinculados | 1003913 | |
sipa.codpersvinculados | 99732 | |
sipa.codpersvinculados | 100407 |
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