Diagnostic of Capacitively Coupled Low Pressure Radio Frequency Plasma: An Approach through Electrical Discharge Characteristic

Simple item page
dc.contributor.authorBora, Bijit
dc.contributor.authorBhuyan, Heman
dc.date.accessioned2016-05-10T18:10:40Z
dc.date.available2016-05-10T18:10:40Z
dc.date.issued2011
dc.identifier.doi10.1063/1.3690870
dc.identifier.issn2010-362X
dc.identifier.urihttps://repositorio.uc.cl/handle/11534/12895
dc.language.isoen
dc.nota.accesoContenido completo
dc.relation.isformatofInternational Journal of Applied Physics and Mathematics No. 2 (2), p. 124-128.
dc.revistaInternational Journal of Applied Physics and Mathematicses_ES
dc.rightsacceso abierto
dc.subject.ddc510
dc.subject.deweyMatemática física y químicaes_ES
dc.subject.otherPlasma (Gases ionizados)es_ES
dc.subject.otherPlasmas a baja temperaturaes_ES
dc.subject.otherPlasma - espectroscopiaes_ES
dc.titleDiagnostic of Capacitively Coupled Low Pressure Radio Frequency Plasma: An Approach through Electrical Discharge Characteristices_ES
dc.typeartículo
sipa.codpersvinculados1011568
sipa.codpersvinculados1003913
Files
Original bundle
Now showing 1 - 1 of 1
Thumbnail Image
Name:
Diagnostic of Capacitively Coupled Low Pressure Radio Frequency Plasma An Approach through Electrical Discharge Characteristic.pdf
Size:
936.17 KB
Format:
Adobe Portable Document Format
Description:
Download
Collections
Artículos de revistas