Measurements of plasma parameters in capacitively coupled radio frequency plasma from discharge characteristics : correlation with optical emission spectroscopy

Thumbnail Image
Files
Measurements of plasma parameters in capacitively coupled radio frequency plasma from discharge characteristics - correlation with optical emission spectroscopy.pdf(2.52 KB)
Date
2013
Authors
Journal Title
Journal ISSN
Volume Title
Publisher
Abstract
Description
Keywords
Citation
URI
https://doi.org/10.1016/j.cap.2013.04.024
 https://repositorio.uc.cl/handle/11534/50503
Collections
Artículos de revistas