Measurements of plasma parameters in capacitively coupled radio frequency plasma from discharge characteristics : correlation with optical emission spectroscopy

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dc.contributor.authorBora, Bijit
dc.contributor.authorBhuyan, Heman
dc.contributor.authorFavre Domínguez, Mario
dc.contributor.authorWyndham, Edmund
dc.contributor.authorChuaqui, Hernán
dc.contributor.authorWong, C.
dc.date.accessioned2021-01-14T19:12:02Z
dc.date.available2021-01-14T19:12:02Z
dc.date.issued2013
dc.format.extent6 páginas
dc.fuente.origenConveris
dc.identifier.doi10.1016/j.cap.2013.04.024
dc.identifier.issn1567-1739
dc.identifier.urihttps://doi.org/10.1016/j.cap.2013.04.024
dc.identifier.urihttps://repositorio.uc.cl/handle/11534/50503
dc.issue.numeroNo. 7
dc.language.isoen
dc.nota.accesoContenido parcial
dc.pagina.final1453
dc.pagina.inicio1448
dc.revistaCurrent Applied Physicses_ES
dc.rightsacceso restringido
dc.subject.ddc510
dc.subject.deweyMatemática física y químicaes_ES
dc.subject.otherPlasma (Gases ionizados)es_ES
dc.subject.otherDensidad del plasmaEspectroscopía de emisiónes_ES
dc.titleMeasurements of plasma parameters in capacitively coupled radio frequency plasma from discharge characteristics : correlation with optical emission spectroscopyes_ES
dc.typeartículo
dc.volumenVol. 13
sipa.codpersvinculados1011568
sipa.codpersvinculados1003913
sipa.codpersvinculados99732
sipa.codpersvinculados100407
sipa.codpersvinculados98761
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