Study on the effect of hydrogen addition on the variation of plasma parameters of argon-oxygen magnetron glow discharge for synthesis of TiO2 films

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Study on the effect of hydrogen addition on the variation of plasma parameters of argon-oxygen magnetron glow discharge for synthesis of TiO2 films.pdf(920.52 KB)
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2016
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https://doi.org/10.1063/1.4947091
 https://repositorio.uc.cl/handle/11534/38609
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